Synthesis and characterization of allyl (β-ketoiminato) palladium(II) complexes;: New CVD precursors for high purity PD thin-films.

被引:0
|
作者
Tung, YL [1 ]
Tseng, WC [1 ]
Hsu, PF [1 ]
Chi, Y [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Chem, Hsinchu 30043, Taiwan
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中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
546-INOR
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页码:U1107 / U1107
页数:1
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