Design and simulation of capacitive SPDT RF MEMS switch to improve its isolation

被引：1
|
作者：
Rao, K. Srinivasa [1 ]
Vasantha, K. [1 ]
Sravani, K. Girija [1 ,2 ]
机构：
[1] Deemed Univ, Koneru Lakshmaiah Educ Fdn, MEMS Res Ctr, Dept ECE, Guntur 522502, Andhra Pradesh, India
[2] Natl Inst Technol NIT, Natl MEMS Design Ctr, Dept ECE, Silchar 788010, Assam, India
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2020年 / 26卷 / 08期
关键词：
Multiphysics - Electric switches - Silicon compounds;
D O I：
10.1007/s00542-020-04795-9
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the simulation and analysis of capacitive shunt SPDT RF MEMS switch for high radio frequency applications. The design is based on the shunt configuration consisting of 2 capacitive type switches. To reduce pull in voltage, the high-frequency capacitive SPDT switch is proposed. The beam is designed with non-uniform meanders with perforations. By using the COMSOL Multiphysics tool, we found the pull-in voltage as 1.5 V at a beam thickness of 0.5 mu m. The corresponding capacitance ratio is 44 for the dielectric of Silicon Nitrate. The up sate and downstate capacitance of the switch is calculated and simulated. The performance analysis is done by using HFSS tool and is found to RF-perform excellently at 28 GHz with isolation of - 68 dB, the return and insertion losses are - 61 dB and - 0.1 dB respectively.
引用
收藏
页码：2553 / 2560
页数：8
相关论文
共 50 条
  • [21] A Novel Approach for Optimized Design of RF MEMS Capacitive Switch
    Asutkar, Supriya B.
    Ghutke, Payal
    PROCEEDINGS OF THE 2016 IEEE 2ND INTERNATIONAL CONFERENCE ON ADVANCES IN ELECTRICAL & ELECTRONICS, INFORMATION, COMMUNICATION & BIO INFORMATICS (IEEE AEEICB-2016), 2016, : 358 - 362
  • [22] Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch
    Li-Ya Ma
    Anis Nurashikin Nordin
    Norhayati Soin
    Microsystem Technologies, 2016, 22 : 537 - 549
  • [23] Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch
    Ma, Li-Ya
    Nordin, Anis Nurashikin
    Soin, Norhayati
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2016, 22 (03): : 537 - 549
  • [24] A Compact SPDT RF MEMS Switch with High Contact Force
    Sedaghat-Pisheh, Hojr
    Rebeiz, Gabriel M.
    2009 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, VOLS 1-3, 2009, : 1213 - 1216
  • [25] RF-MEMS capacitive switch with isolation valley at lower frequency band
    Jung, CW
    Ghodsian, B
    Cetiner, BA
    De Flaviis, F
    SMART STRUCTURES AND MATERIALS 2004: SMART ELECTRONICS, MEMS, BIOMEMS AND NANOTECHNOLOGY, 2004, 5389 : 92 - 100
  • [26] RF MEMS Capacitive Switch with High Isolation for 5G Communication
    Mansoor, Saad
    Khan, A. A.
    2019 INTERNATIONAL CONFERENCE ON COMMUNICATION TECHNOLOGIES (COMTECH), 2019, : 1 - 3
  • [27] π-Phase Shifter Using Single RF MEMS SPDT Switch
    Gao, Jing
    Li, Keren
    Yamamoto, Yasuhisa
    Hanada, Hiroshi
    APMC: 2008 ASIA PACIFIC MICROWAVE CONFERENCE (APMC 2008), VOLS 1-5, 2008, : 2362 - 2365
  • [28] A Novel Capacitive RF MEMS Switch Design for Low Voltage Applications
    Singh, Tejinder
    Khaira, Navjot
    Sengar, Jitendra
    2013 FOURTH INTERNATIONAL CONFERENCE ON COMPUTING, COMMUNICATIONS AND NETWORKING TECHNOLOGIES (ICCCNT), 2013,
  • [29] Design and analysis of asymmetric structure capacitive RF MEMS shunt switch
    Rao, K. Srinivasa
    Sailaja, B. V. S.
    Vineetha, K. V.
    Kumar, P. Ashok
    Guha, Koushik
    Sravani, K. Girija
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2021, 27 (02): : 503 - 513
  • [30] Experimental Validation of Topology Optimization for RF MEMS Capacitive Switch Design
    Philippine, Mandy Axelle
    Zareie, Hosein
    Sigmund, Ole
    Rebeiz, Gabriel M.
    Kenny, Thomas W.
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2013, 22 (06) : 1296 - 1309
12345