Quasi-Blind Voltage Contrast In e Beam Inspection

被引：0
|
作者：
Liao, Hsiang-Chou [1 ]
Li, Hsiao-Leng [1 ]
Tuung Luoh [1 ]
Yang, Ling-Wu [1 ]
Yang, Tahone [1 ]
Chen, Kuang-Chao [1 ]
Lu, Chih-Yuan [1 ]
机构：
[1] Macronix Int Co Ltd, Technol Dev Ctr, Hsinchu, Taiwan
来源：
2013 E-MANUFACTURING & DESIGN COLLABORATION SYMPOSIUM (EMDC) | 2013年
关键词：
e Beam Inspection; Leap and Scan; Hot Spot; Voltage Contrast; Surface Charging;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The different inspection methodologies in e beam are put together to compare their inspection performance on irregularly periphery via plugs. The results demonstrate hot spot inspection mode has better alignment performance and higher sensitivity than leap and scan mode. Hot spot mode can inspect the tiny variation of voltage contrast (VC) with high sensitivities. One type of VC variation inspected by hot spot mode so call qausi-blind VC is addressed here that was not reported before.
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页数：3
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