Collisionless heating in capacitively-coupled radio frequency discharges

被引：0
|
作者：
Turner, MM [1 ]
机构：
[1] Dublin City Univ, Plasma Res Lab, Dublin 9, Ireland
来源：
ELECTRON KINETICS AND APPLICATIONS OF GLOW DISCHARGES | 1998年 / 367卷
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中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：313 / 328
页数：16
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