One-to-one internal resonance in a symmetric MEMS micromirror

Resonant modal interaction is a nonlinear dynamic phenomenon observed in structures excited at large vibration amplitudes. In the present work, we report the experimental evidence of a 1:1 internal resonance in a symmetric resonant micromirror. The experiments are complemented with a reduced model obtained from the 3D finite element discretization of the device by parametrizing the system motion along a low dimensional invariant set of the phase space. The presence of coupling monomials in the governing equations makes the resulting dynamics non-linearizable. Both model and experimental data show the existence of a complex pattern of multiple stable solutions for a given value of the excitation frequency. Published under an exclusive license by AIP Publishing.