An in-situ technique for measuring Young's modulus and residual stress of each layer for multi-layer film

被引：0
|
作者：
Nie, M [1 ]
Huang, QA [1 ]
Li, WH [1 ]
Rong, H [1 ]
机构：
[1] SE Univ, Minist Educ, Key Lab MEMS, Nanjing 210096, Peoples R China
来源：
Transducers '05, Digest of Technical Papers, Vols 1 and 2 | 2005年
关键词：
multi-layered fixed-fixed beam; material properties; pull-in; VOLTAGE;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
This paper presents an approach to characterize the material properties of the multi-layered films using the electrostatic pull-in test structure. The structure is composed of the multi-layered fixed-fixed beam with different widths. An analytical model for the pull-in voltage of the multi-layered fixed-fixed beam with different widths is first presented. The model is then fitted by using the numerical analysis to improve further its accuracy. Based on this model, a novel in-situ method for simultaneously extracting Young's modulus and residual stress of each layer for the multi-layered films is reported. Validation and accuracy of the extracting method have been confirmed by FEM simulation and experiments.
引用
收藏
页码：836 / 839
页数：4
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