共 50 条
- [22] Silicon surface preparation for two-dimensional dopant characterization CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY, 1998, 449 : 736 - 740
- [23] Characterization of two-dimensional dopant profiles: Status and review JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (01): : 196 - 201
- [24] Guidelines for two-dimensional dopant profiling using SCM ISTFA 2000: PROCEEDINGS OF THE 26TH INTERNATIONAL SYMPOSIUM FOR TESTING AND FAILURE ANALYSIS, 2000, : 521 - 527
- [25] Analysis and simulation of two-dimensional dopant diffusion in silicon SMART MATERIALS, 2001, : 83 - 95
- [26] Assessing the performance of two-dimensional dopant profiling techniques JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (01): : 385 - 393
- [27] Two-dimensional dopant profiling by scanning capacitance microscopy ANNUAL REVIEW OF MATERIALS SCIENCE, 1999, 29 : 471 - 504
- [30] MAGNETIC-FIELD DEPENDENCE OF THE JOSEPHSON CURRENT IN TWO-DIMENSIONAL TUNNEL-JUNCTIONS PHYSICAL REVIEW B, 1989, 40 (04): : 2128 - 2132