Analysis of the vibration modes of piezoelectric circular microdiaphragms

The vibration modes of a piezoelectric circular microdiaphragm (PCM) are visualized and investigated in this paper. The PCM was previously fabricated by combining sol-gel PZT thin film and MEMS technology (Olfatnia et al 2010 J. Micromech. Microeng. 20 015007). We used a reflection digital holography microscope to visualize different frequency modes. It was found that the degeneracy of the modes with at least one nodal diameter is broken, even though it was expected that these orthogonal modes are degenerated in frequency (Meirovitch 1967 Analytical Methods in Vibrations (New York: Macmillan)). These non-degenerated modes are correlated to the lack of symmetry of the PCM, mainly imposed by the top electrode configuration. The theoretical and experimental measurements of the resonance frequency of different modes show that even though for the first fundamental mode, the diaphragm behaves more like a membrane, in higher modes the stiffness contribution increases, for instance, from 6% in mode (0, 1) to 46% in mode (0, 3). Finite element simulations demonstrate that the frequency shift of the PCM to mass loading increases in higher frequency modes. This shift is almost 8.5 times higher in mode (0, 3) than in mode (0, 1). The impedance characterization of the PCM shows that by applying higher excitation voltages, more vibration modes can be excited. However, these higher voltages induce geometric nonlinearities in the PCM, which in turn increases the resonant frequency of the device.