The influence of MWCVD process parameters on formation of SIC.

被引：0
|
作者：
Dul, K [1 ]
Jonas, S [1 ]
机构：
[1] Stanislaw Staszic Univ Min & Met, Fac Mat Sci & Ceram, PL-30059 Krakow, Poland
来源：
ANNALES DE CHIMIE-SCIENCE DES MATERIAUX | 2003年 / 28卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
The SiC layers were deposited on Si (100) at the temperature by MicroWave Chemical Vapour Deposition (MWCVD) method. The polytype and the structural composition were investigated as a function chamber pressure, substrate temperature, methane, silane and hydrogen flow, MW power. The main methods of characterisation were X-Ray Diffraction (XRD), Fourier Transform Infra-Red Spectroscopy (FTIR) and Raman Spectroscopy.
引用
收藏
页码：S125 / S132
页数：8
相关论文
共 50 条
  • [31] INFLUENCE OF GAS-PHASE PARAMETERS ON THE DEPOSITION KINETICS AND MORPHOLOGY OF THIN DIAMOND FILMS DEPOSITED BY HFCVD AND MWCVD TECHNIQUE
    BECKMANN, R
    KULISCH, W
    FRENCK, HJ
    KASSING, R
    DIAMOND AND RELATED MATERIALS, 1992, 1 (2-4) : 164 - 167
  • [32] The influence of laser cladding process parameters on the microstructure and properties of SiC/ZL101 coatings
    Kong, Decheng
    Zhao, Zhanyong
    Du, Wenbo
    Bai, Peikang
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2025, 131 (04):
  • [33] The Influence of Process Parameters of EDM on the Surface Roughness of Aluminum Matrix Composites Reinforced with SiC Particulates
    Guleryuz, L. Feray
    Ozan, S.
    Kasman, S.
    Ipek, R.
    ACTA PHYSICA POLONICA A, 2013, 123 (02) : 421 - 423
  • [34] Investigating the Influence of Process Parameters of ZNC EDM on Machinability of A6061/10% SiC Composite
    Singh, Balbir
    Kumar, Jatinder
    Kumar, Sudhir
    ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, 2013, 2013
  • [35] The influence of process parameters on in situ inorganic foaming of alkali-bonded SiC based foams
    Medri, Valentina
    Ruffini, Andrea
    CERAMICS INTERNATIONAL, 2012, 38 (04) : 3351 - 3359
  • [36] Influence of deposition parameters on the properties of SiC films
    Vlaskina, S.I.
    Rodionov, V.E.
    Svechnikov, S.V.
    Materials science & engineering. B, Solid-state materials for advanced technology, 1992, B11 (1-4): : 67 - 68
  • [37] INFLUENCE OF DEPOSITION PARAMETERS ON THE PROPERTIES OF SIC FILMS
    VLASKINA, SI
    RODIONOY, VE
    SVECHNIKOV, SV
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1992, 11 (1-4): : 67 - 68
  • [38] Influence of process parameters on the weld lines formation in rapid heat cycle molding
    Fiorotto, Marco
    Lucchetta, Giovanni
    14TH INTERNATIONAL CONFERENCE ON MATERIAL FORMING ESAFORM, 2011 PROCEEDINGS, 2011, 1353 : 797 - 802
  • [39] RELATIONSHIPS BETWEEN MICROSTRUCTURE AND MECHANICAL PROPERTIES IN HOT-PRESSED beta -SiC.
    Lin, Bor-wen
    Li, Ai-kang
    Wang, Chien-min
    MRL bulletin of research and development, 1988, 2 (01): : 57 - 63
  • [40] Influence of process parameters on the formation and quality of joining zones during induction brazing
    Zahid, Ali
    Zahid, Umer
    ENGINEERING RESEARCH EXPRESS, 2020, 2 (02):
12345