Non-isothermal micromechanical resonators

被引：0

作者：

Chandorkar, S. A. ^{[1
]}

Mehta, H. ^{[1
]}

Agarwal, M. ^{[1
]}

Hopcroft, M. A. ^{[1
]}

Jha, C. M. ^{[1
]}

Candler, R. N. ^{[2
]}

Yama, G. ^{[2
]}

Bahl, G. ^{[1
]}

Kim, B. ^{[1
]}

Melamud, R. ^{[1
]}

Goodson, K. E. ^{[1
]}

Kenny, T. W. ^{[1
]}

机构：

[1] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA

[2] Robert Bosch Corp, Res & Technol Ctr, Palo Alto, CA 94303 USA

来源：

PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2 | 2007年

基金：

美国国家科学基金会;

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, we study the effect of non-isothermal operation on beam-type micromechanical resonators. A double, ended tuning fork (DETF) resonator was studied under a linearly varying temperature profile along the length of the beam. We present models which show that for a constant center temperature of the beams, increasing the linear temperature gradient along the DETF substantially increases the quality factor (Q), with marginal effect on frequency. We also find that it is possible to use non-isothermal operation to improve quality factor in MEMS resonator based ovenized reference oscillators.

引用

页码：714 / +

页数：2

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