A linear Bragg-Fresnel optics fabricated for 1D focusing of 18 nm X-ray radiation

被引：0
|
作者：
Le, ZC [1 ]
Liang, JQ [1 ]
Yao, JS [1 ]
Li, C [1 ]
机构：
[1] Chinese Acad Sci, Changchun Inst Opt & Fine Mech, Changchun 130022, Peoples R China
来源：
OPTICS AND LASER TECHNOLOGY | 1998年 / 30卷 / 6-7期
基金：
中国国家自然科学基金;
关键词：
linear Bragg-Fresnel optics; fabrication; diffraction pattern; Mo/Si multilayer;
D O I：
10.1016/S0030-3992(98)00071-1
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The theoretical and technique results of a 1D focusing linear Bragg-Fresnel optics working at 18 nm X-ray radiation are given in the present paper. A theoretical method describing its optical performances is introduced briefly, the: parameters of the diffraction pattern are presented. The preparation of multilayer mirrors. the decision of X-ray absorber layer thickness and the fabrication process of the diffraction pattern are described. The studied results of thermal and chemical stabilities for Mo/Si multilayer structure are shown. Some measured results for the 1D focusing linear Bragg-Fresnel optics are given. (C) 1999 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：403 / 406
页数：4
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