Process parameter control for the formation of porous silicon through nanoporous alumina using pulsed anodization

被引：0
|
作者：
Bhattacharya, Neelanjan [1 ]
Das, Biswajit [1 ]
机构：
[1] Univ Nevada, Howard R Hughes Coll Engn, Nevada Nanotechnol Ctr, Las Vegas, NV 89154 USA
来源：
NANOTECHNOLOGY (GENERAL) - 218TH ECS MEETING | 2011年 / 33卷 / 38期
关键词：
D O I：
10.1149/1.3583512
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This paper discusses the formation of porous silicon through porous alumina using pulsed anodization for various parameters of anodization, type of acid for the formation of porous alumina, and their characterization using photoluminescence. The porous alumina has been synthesized using sulfuric, oxalic and phosphoric acids and luminescent porous silicon through the porous alumina has been obtained in each case. The porous silicon through porous alumina formation has also been investigated using pulsed anodization. The duty cycle and frequency of the square wave pulse have been varied and the optical properties of the porous silicon, so formed, through the porous alumina, have been investigated.
引用
收藏
页码：33 / 42
页数：10
相关论文
共 50 条
  • [31] Modelling of porous silicon formation process
    Haurylau, M
    MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2001, 15 (1-2): : 117 - 119
  • [32] Electrochemical etching of silicon through anodic porous alumina
    Asoh, H
    Sasaki, K
    Ono, S
    ELECTROCHEMISTRY COMMUNICATIONS, 2005, 7 (09) : 953 - 956
  • [33] Porous silicon formation under constant anodization conditions: Homogeneous regime or transition?
    Hamm, D
    Sakka, T
    Ogata, YH
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2004, 151 (01) : C32 - C37
  • [34] Formation of nanoporous structure in silicon substrate using two-stage annealing process
    Denisenko, Yuri I.
    Rudakov, Valery I.
    INTERNATIONAL CONFERENCE ON MICRO- AND NANO-ELECTRONICS 2016, 2016, 10224
  • [35] Fabrication and characterization of highly ordered porous alumina templates by a two-step anodization process
    Leon-Patino, C. A.
    Aguilar-Reyes, E. A.
    Ruiz-Aguilar, C.
    STRUCTURAL AND CHEMICAL CHARACTERIZATION OF METALS, ALLOYS AND COMPOUNDS, 2013, 755 : 75 - 81
  • [36] Constructing geometrically-ordered alumina nanoporous filters and alumina nanowire arrays by using ultrahigh voltage two step anodization
    Barzegar, Sedigheh
    Absalan, Ghodratollah
    Moradi, Mahmood
    Behaein, Saeid
    PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2020, 117
  • [37] Study of the porous polycrystalline silicon formation process
    Andrushin, SY
    Balagurov, LA
    Bayliss, SC
    Orlov, AF
    Petrova, EA
    Yarkin, DG
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2004, 19 (12) : 1343 - 1347
  • [38] Preparation and formation mechanism of alumina nanowires through a one-step anodization method
    Hebei University of Technology, Tianjin
    300130, China
    Xiyou Jinshu Cailiao Yu Gongcheng, 9 (2326-2329):
  • [39] Preparation and Formation Mechanism of Alumina Nanowires through a One-Step Anodization Method
    Wang Xixin
    Zhao Jianling
    Bai Liyun
    RARE METAL MATERIALS AND ENGINEERING, 2015, 44 (09) : 2326 - 2329
  • [40] Formation of Porous GaAs by Pulsed Current Electrochemical Anodization: SEM, XRD, Raman, and Photoluminescence Studies
    Ali, N. K.
    Hashim, M. R.
    Aziz, A. Abdul
    Abu Hassan, H.
    Ismail, J.
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2009, 12 (03) : K9 - K13
12345