Novel thermal microactuator based on CVD-diamond films

被引：5
|
作者：
Gluche, P [1 ]
Leuner, R [1 ]
Kohn, E [1 ]
Rembe, C [1 ]
Wiesche, SAD [1 ]
Hofer, EP [1 ]
机构：
[1] Univ Ulm, Dept Electron Devices & Circuits, Ulm, Germany
来源：
INTERNATIONAL ELECTRON DEVICES MEETING 1998 - TECHNICAL DIGEST | 1998年
关键词：
D O I：
10.1109/IEDM.1998.746403
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Thermal microactuators offer a large potential for technical applications such as inkjet print heads, micro drop valves, micro pumps or chemical micro reactors. However, the enormous mechanical and thermal stress limits the device reliability and efficiency up to now. In order to overcome complex technologies and reliability problems, we present the first thermal diamond microactuator, enabling superheating of various liquids, highly reproducible drop ejection with high reliability and a fabrication technology of low complexity.
引用
收藏
页码：483 / 486
页数：4
相关论文
共 50 条
  • [21] Optical position sensitive detectors based on CVD-diamond samples
    Mazzeo, G
    Salvatori, S
    Rossi, MC
    Della Scala, A
    Conte, G
    SENSORS AND MICROSYSTEMS, PROCEEDINGS, 2004, : 515 - 520
  • [22] DEVELOPMENT OF A DETECTOR BASED ON A CVD-DIAMOND FOR THE USE IN RADIOTHERAPY FACILITIES
    Akulinichev, S. V.
    Klenov, V. S.
    Kravchuk, L. V.
    Lebedev, S. G.
    Feschenko, A. V.
    Yants, V. E.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2006, (03): : 134 - 136
  • [23] A CVD-diamond based beam profile monitor for undulator radiation
    Schulze-Briese, C
    Ketterer, B
    Pradervand, C
    Brönnimann, C
    David, C
    Horisberger, R
    Puig-Molina, A
    Graafsma, H
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2001, 467 : 230 - 234
  • [24] Comparison of thermal conductivities on abraded and untreated CVD-Diamond obtained by scanning thermal microscopy
    Altes, A
    Heiderhoff, R
    Balk, LJ
    Jentsch, HG
    Rosiwal, SM
    INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2002, 16 (6-7): : 922 - 926
  • [25] The effect of nondiamond carbon admixture on the electrochemical behavior of polycrystalline CVD-diamond films
    Yu. V. Pleskov
    M. D. Krotova
    V. P. Varnin
    I. G. Teremetskaya
    Russian Journal of Electrochemistry, 2010, 46 : 325 - 330
  • [26] Thermal conductivity of CVD diamond films
    Chae, HB
    Park, KH
    Seong, DJ
    Kim, JC
    Baik, YJ
    INTERNATIONAL JOURNAL OF THERMOPHYSICS, 1996, 17 (03) : 695 - 703
  • [27] Thermal conductivity of CVD diamond films
    Soonchunhyang Univ, Chungnam, Korea, Republic of
    Int J Thermophys, 3 (695-703):
  • [28] The Effect of Nondiamond Carbon Admixture on the Electrochemical Behavior of Polycrystalline CVD-Diamond Films
    Pleskov, Yu. V.
    Krotova, M. D.
    Varnin, V. P.
    Teremetskaya, I. G.
    RUSSIAN JOURNAL OF ELECTROCHEMISTRY, 2010, 46 (03) : 325 - 330
  • [29] Development and Test of CVD-Diamond Microgrinding Wheels
    Hoffmeister, Hans-Werner
    Wittmer, Ronald
    ADVANCED PRECISION ENGINEERING, 2010, 447-448 : 131 - 135
  • [30] Electrostatic seeding (ESS): A novel approach to seeding substrates for CVD-diamond growth
    Malshe, AP
    Khanolkar, AA
    Brown, WD
    Yedave, SN
    Naseem, HA
    Haque, MS
    PROCEEDINGS OF THE FIFTH INTERNATIONAL SYMPOSIUM ON DIAMOND MATERIALS, 1998, 97 (32): : 399 - 421
12345