Novel thermal microactuator based on CVD-diamond films

被引：5

作者：

Gluche, P ^{[1
]}

Leuner, R ^{[1
]}

Kohn, E ^{[1
]}

Rembe, C ^{[1
]}

Wiesche, SAD ^{[1
]}

Hofer, EP ^{[1
]}

机构：

[1] Univ Ulm, Dept Electron Devices & Circuits, Ulm, Germany

来源：

INTERNATIONAL ELECTRON DEVICES MEETING 1998 - TECHNICAL DIGEST | 1998年

关键词：

D O I：

10.1109/IEDM.1998.746403

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thermal microactuators offer a large potential for technical applications such as inkjet print heads, micro drop valves, micro pumps or chemical micro reactors. However, the enormous mechanical and thermal stress limits the device reliability and efficiency up to now. In order to overcome complex technologies and reliability problems, we present the first thermal diamond microactuator, enabling superheating of various liquids, highly reproducible drop ejection with high reliability and a fabrication technology of low complexity.

引用

页码：483 / 486

页数：4

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