Optimization of the LPCVD Equipment Intergraded Production System of the Solar Cell Production Line

To address the problem that the actual production capacity of the thin-film solar cell production line has been usually lower than the designed capacity, this study analyzed the indicators of various production processes, including WIP, Queue Time and Uptime, and observed that LPCVD is the critical process leading to low productivity. Meanwhile, the primary reason for the occurrence of frequent failures in this process is that the control logic of robot feeding and reclaiming is too complex, and the data transmission volume between different interfaces is too huge. In view of such a situation, this study proposed to assign priority to the job list of the LPCVD process. This solution attempts to reduce the data transmission volume between interfaces by modifying priority of the instruction received by the robot without changing data communication interfaces, so as to decrease system failures. The results of implementation show that the production capacity after optimization approaches to 100%. At the same time, the robot workload is significantly reduced, while the operational life of the equipment is lengthened. Furthermore, the comparative analysis of Uptime, WIP and Queue time and the analysis of robot efficiency confirms the feasibility and operability of this optimization scheme.