Analysis of single layers placed on slightly rough surfaces by spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy

被引：0
|
作者：
Ohlidal, I [1 ]
Franta, D [1 ]
Rezek, B [1 ]
Ohlidal, M [1 ]
机构：
[1] Masaryk Univ, Fac Sci, Dept Solid State Phys, CS-61137 Brno, Czech Republic
来源：
ECASIA 97: 7TH EUROPEAN CONFERENCE ON APPLICATIONS OF SURFACE AND INTERFACE ANALYSIS | 1997年
关键词：
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：1051 / 1054
页数：4
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