Preparation of micro patterns with profile heights up to 100 μm by sol gel technology

被引：0
|
作者：
Mennig, M [1 ]
Gier, A [1 ]
Schmidt, H [1 ]
机构：
[1] Inst Neue Mat Gem GMBH, D-66123 Saarbrucken, Germany
来源：
MICRO MATERIALS, PROCEEDINGS | 2000年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：322 / 322
页数：1
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