Investigation of surface acoustic wave fields in silicon crystals by x-ray diffraction: A dynamical theory approach

被引:6
|
作者
Tucoulou, R
Mathon, O
Ferrero, C
Mocella, V
Roshchupkin, DV
Kumon, RE
机构
[1] European Synchrotron Radiat Facil, F-38043 Grenoble, France
[2] CNR, IMM, I-80131 Naples, Italy
[3] Russian Acad Sci, Inst Microelect Technol, Chernogolovka 142432, Moscow District, Russia
[4] Univ Windsor, Dept Phys, Windsor, ON N9B 3P4, Canada
关键词
D O I
10.1063/1.1905778
中图分类号
O59 [应用物理学];
学科分类号
摘要
X-ray diffraction spectra at different x-ray energies from a Si crystal subjected to a deformation produced by surface acoustic wave propagation have been modeled using the general framework of dynamical diffraction theory. The simulations have been successfully compared with the corresponding experimental results confirming the accuracy of the elastic model describing the acoustic wave fields inside the crystal. (C) 2005 American Institute of Physics.
引用
收藏
页数:5
相关论文
共 50 条