Optimum Design of a Capacitive Pressure Sensor

被引：0
|
作者：
Ibrahim, Khalilullah [1 ]
Khanna, Gargi [1 ]
机构：
[1] NIT Hamirpur, Hamirpur, India
来源：
PROCEEDINGS OF THE 10TH INDIACOM - 2016 3RD INTERNATIONAL CONFERENCE ON COMPUTING FOR SUSTAINABLE GLOBAL DEVELOPMENT | 2016年
关键词：
Pressure sensor; intraocular pressure; Parallel plate capacitor; Clamped; Edge slotted and Corner slotted diaphragm; COMSOL Multiphysics;
D O I：
暂无
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
This paper presents a MEMS capacitive pressure sensor optimized for high sensitivity. It will find its importance in sensing intraocular pressure (IOP) of a Glaucoma patient. The study involves comparing maximum displacement of the movable diaphragm of a parallel plate capacitor for different designs. The sensor design involves clamped, edge slotted and corner slotted diaphragms. The results yielded a displacement of 0.6656 mu m for clamped 0.9088 mu m for corner slotted and 4.6811 mu m for edge slotted diaphragms. The analysis was done using COMSOL Multiphysics and some of the results were compared with that of Coventorware.
引用
收藏
页码：1685 / 1688
页数：4
相关论文
共 50 条
  • [31] Modeling, design and fabrication of a triple-layered capacitive pressure sensor
    Zhou, MX
    Huang, QA
    Ming, Q
    SENSORS AND ACTUATORS A-PHYSICAL, 2005, 117 (01) : 71 - 81
  • [32] Efficient in-depth analysis and optimum design parameter estimation of MEMS capacitive pressure sensor utilizing analytical approach for square diaphragm
    Sumit Kumar Jindal
    Ishan Patel
    Krish Sethi
    Simrit Kaul
    P. K. Sreekanth
    Ajay Kumar
    Journal of Computational Electronics, 2022, 21 : 992 - 1004
  • [33] Efficient in-depth analysis and optimum design parameter estimation of MEMS capacitive pressure sensor utilizing analytical approach for square diaphragm
    Jindal, Sumit Kumar
    Patel, Ishan
    Sethi, Krish
    Kaul, Simrit
    Sreekanth, P. K.
    Kumar, Ajay
    JOURNAL OF COMPUTATIONAL ELECTRONICS, 2022, 21 (04) : 992 - 1004
  • [34] Design for 1μbar Resolution Pressure Measurement and Display ASIC for MEMS Capacitive Pressure Sensor
    Eswaran, P.
    Malarvizhi, S.
    Sivasankar, S.
    2014 INTERNATIONAL CONFERENCE ON CONTROL, INSTRUMENTATION, COMMUNICATION AND COMPUTATIONAL TECHNOLOGIES (ICCICCT), 2014, : 637 - 641
  • [35] Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range
    Ansari H.R.
    Kordrostami Z.
    Energy Harvesting and Systems, 2021, 8 (02) : 81 - 85
  • [36] Robust capacitive pressure sensor array
    Chang, SP
    Lee, JB
    Allen, MG
    SENSORS AND ACTUATORS A-PHYSICAL, 2002, 101 (1-2) : 231 - 238
  • [37] DESIGN AND CHARACTERIZATION OF A CMOS MEMS CAPACITIVE SQUEEZE-FILM PRESSURE SENSOR
    Chiu, Jason
    Lu, Michael S-C
    2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2019, : 755 - 758
  • [38] CMOS Capacitive Pressure Sensor Design and Integration with RFID Tag for Biomedical Applications
    Munnangi, S. R.
    Haobijam, G.
    Kothamasu, M.
    Paily, R.
    Kshetrimayum, R. S.
    2008 IEEE REGION 10 CONFERENCE: TENCON 2008, VOLS 1-4, 2008, : 2459 - 2464
  • [39] Integrated capacitive absolute pressure sensor
    Matsumoto, Yoshinori
    Esasi, Masayoshi
    Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi), 1993, 76 (01): : 93 - 106
  • [40] SYMMETRICAL DIFFERENTIAL CAPACITIVE PRESSURE SENSOR
    PETERS, RD
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (08): : 2256 - 2261
12345