Optimum Design of a Capacitive Pressure Sensor

被引：0

作者：

Ibrahim, Khalilullah ^{[1
]}

Khanna, Gargi ^{[1
]}

机构：

[1] NIT Hamirpur, Hamirpur, India

来源：

PROCEEDINGS OF THE 10TH INDIACOM - 2016 3RD INTERNATIONAL CONFERENCE ON COMPUTING FOR SUSTAINABLE GLOBAL DEVELOPMENT | 2016年

关键词：

Pressure sensor; intraocular pressure; Parallel plate capacitor; Clamped; Edge slotted and Corner slotted diaphragm; COMSOL Multiphysics;

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

This paper presents a MEMS capacitive pressure sensor optimized for high sensitivity. It will find its importance in sensing intraocular pressure (IOP) of a Glaucoma patient. The study involves comparing maximum displacement of the movable diaphragm of a parallel plate capacitor for different designs. The sensor design involves clamped, edge slotted and corner slotted diaphragms. The results yielded a displacement of 0.6656 mu m for clamped 0.9088 mu m for corner slotted and 4.6811 mu m for edge slotted diaphragms. The analysis was done using COMSOL Multiphysics and some of the results were compared with that of Coventorware.

引用

页码：1685 / 1688

页数：4

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