Challenges and Limits of the Interferometric Precision Measurement Technique

The most important principle, the basis and operation of heterodyne and homodyne interferometers are discussed. Their benefits and limitations are covered based on a metrological analysis. The resolution of interferometers can be determined by calculating the smallest resolvable distance increment. An Abbe-error-free design is explained using interferometers by means of a nanopositioning and nanomeasuring machine developed at the Institute of Process Measurement and Sensor Technology (Ilmenau University of Technology) and manufactured at the SIOS Messtechnik GmbH Ilmenau, Germany.