Post exposure baking temperature effect on resist profile with bottom anti-reflective coating

被引：0
|
作者：
Dai, CM [1 ]
Lin, CL [1 ]
Tai, SC [1 ]
Lamb, JE [1 ]
Iida, M [1 ]
机构：
[1] ITRI,ERSO,SUBMICRON TECHNOL GRP,HSINCHU 310,TAIWAN
来源：
OPTICAL MICROLITHOGRAPHY IX | 1996年 / 2726卷
关键词：
D O I：
10.1117/12.240985
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：598 / 607
页数：10
相关论文
共 50 条
  • [1] BARC (Bottom anti-reflective coating) for immersion process
    Hiroi, Yoshiomi
    Kishioka, Takahiro
    Sakamoto, Rikimaru
    Maruyama, Daisuke
    Ohashi, Takuya
    Ishida, Tomohisa
    Kimura, Shigeo
    Sakaida, Yasushi
    Watanabe, Hisayuki
    ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXIV, 2007, 6519
  • [2] Footing reduction in the organic bottom anti-reflective coating implementation
    Ko, TM
    Cheng, A
    MICROLITHOGRAPHIC TECHNIQUES IN IC FABRICATION, 1997, 3183 : 196 - 206
  • [3] Wafer scale error induced by bottom anti-reflective coating
    Kim, DS
    Jeong, JH
    Nam, BH
    Hwang, YJ
    Song, YJ
    METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XV, 2001, 4344 : 608 - 615
  • [4] Advances and Challenges in Developable Bottom Anti-Reflective Coating (DBARC)
    Kudo, Takanori
    Chakrapani, Srinivasan
    Dioses, Alberto
    Ng, Edward
    Antonio, Charito
    Parthasarathy, Deepa
    Miyazaki, Shinji
    Yamamoto, Kazuma
    Akiyama, Yasushi
    Collett, Richard
    Neisser, Mark
    Padmanaban, Munirathna
    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2010, 23 (05) : 731 - 740
  • [5] Study of Major Factors to Affect Photoresist Profile on Developable Bottom Anti-Reflective Coating Process
    Roh, Hyo Jung
    Ju, Dong Kyu
    Kim, Hyun Jin
    Kim, Jaehyun
    ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVIII, 2011, 7972
  • [6] Effect of Anti-Reflective Coating for Si Optical Resonator Biosensors
    Maeda, Jun
    Funamoto, Riku
    Amemiya, Yoshiteru
    Yokoyama, Shin
    2019 2ND INTERNATIONAL SYMPOSIUM ON DEVICES, CIRCUITS AND SYSTEMS (ISDCS 2019), 2019,
  • [7] EFFECT of ANTI-REFLECTIVE COATING on CIGS SOLAR CELLS PERFORMANCE
    Khadir, Abdelkader
    Kouzou, Abdellah
    Abdelhafidi, Mohamed Kamel
    PROCEEDINGS OF THE 2020 17TH INTERNATIONAL MULTI-CONFERENCE ON SYSTEMS, SIGNALS & DEVICES (SSD 2020), 2020, : 621 - 625
  • [8] Wet developable bottom anti-reflective coatings
    Hatanaka, T
    Kimura, S
    Enomoto, T
    Nakajima, Y
    ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XXI, PTS 1 AND 2, 2004, 5376 : 655 - 663
  • [9] Photochemical studies on bottom anti-reflective coatings
    Guerrero, Douglas J.
    Mercado, Ramil
    Washburn, Carlton
    Meador, Jim
    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2006, 19 (03) : 343 - 347
  • [10] Bottom Anti-reflective Coating for Hyper NA Process: Theory, Application and Material Development
    Yao, Huirong
    Cho, Joonyeon
    Yin, Jian
    Mullen, Salem
    Lin, Guanyang
    Neisser, Mark
    Dammel, Ralph
    LITHOGRAPHY ASIA 2008, 2008, 7140
12345