A replicated micro-optical sensor for industrial spectral analysis

被引:0
|
作者
Teichmann, HW [1 ]
Hiller, D [1 ]
Westenhöfer, SD [1 ]
Pedersen, JS [1 ]
Gale, MT [1 ]
机构
[1] CSEM SA, Div Photon, Spectrosolut, CH-8048 Zurich, Switzerland
来源
TECHNISCHES MESSEN | 2001年 / 68卷 / 05期
关键词
D O I
10.1524/teme.2001.68.5.200
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A new replicated miniature spectrometer module is presented which is made for industry-to-industry use. The sensor concept, its fabrication technology, and the performance achieved are discussed in relation to industrial applications. The module is part of a PC-controlled spectral sensing system.
引用
收藏
页码:200 / 203
页数:4
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