Crystal growth and design of Sn-doped β-Ga2O3: Morphology, defect and property studies of cylindrical crystal by EFG

被引:35
|
作者
Fu, Bo [1 ,2 ]
Jian, Guangzhong [3 ]
Mu, Wenxiang [1 ,2 ]
Li, Yang [1 ]
Wang, Huanyang [1 ]
Jia, Zhitai [1 ,6 ]
Li, Yanbin [5 ,6 ]
Long, Shibing [3 ]
Shi, Yujun [4 ]
Tao, Xutang [1 ,2 ]
机构
[1] Shandong Univ, State Key Lab Crystal Mat, Jinan 250100, Shandong, Peoples R China
[2] Shandong Univ, Shenzhen Res Inst, Shenzhen 518057, Peoples R China
[3] Univ Sci & Technol China, Sch Microelect, Hefei 230026, Peoples R China
[4] Univ Calgary, Dept Chem, Calgary, AB T2N 1N4, Canada
[5] Jiangsu Normal Univ, Sch Phys & Elect Engn, Jiangsu Key Lab Adv Laser Mat & Devices, Xuzhou 221116, Jiangsu, Peoples R China
[6] Jiangsu Xiyi Adv Mat Res Inst Ind Technol, Xuzhou 221400, Jiangsu, Peoples R China
基金
中国国家自然科学基金;
关键词
Sn-doped beta-Ga2O3; Cylindrical crystal; EFG; Morphology; Defect; SINGLE-CRYSTALS; OPTICAL-PROPERTIES; SCINTILLATION; TRANSPARENT;
D O I
10.1016/j.jallcom.2021.162830
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The cylindrical Sn: beta-Ga2O3 crystal with high crystalline quality was successfully designed and grown by the innovative edge-defined film-fed growth (EFG) method equipped with a cylindrical Iridium die. The chal-lenges for the growth of Sn: beta-Ga2O3 crystals were overcome by optimizing the design of an afterheater. The growth morphology of cylindrical beta-Ga2O3 crystal was studied using a theoretical model and the results from experimental crystal growth. The order of importance of growth conditions affecting beta-Ga2O3 crystal growth morphology was examined, based on the morphological features of cylindrical beta-Ga2O3 crystals obtained by the EFG and Czochralski methods. The iridium inclusions with three shapes were observed in bulk beta-Ga2O3 crystal, and the formation mechanism was carefully discussed. The optical bandgap and valence band maximum (VBM) of Sn: beta-Ga2O3 crystal were calculated to be 4.74 eV and 3.49 eV by absorption spectra and X-ray photoelectron spectroscopy (XPS), respectively. The corresponding surface barrier height (Phi(surf)) was 1.25 eV. The carrier concentration of 5.95 x 10(18) cm(-3) was characterized by capacitance-voltage (C-V) measurement. By the Hall measurement, the carrier mobility and resistivity were estimated to be around 51 cm(2) V-1 s(-1) and 3.55 x 10(-2) Omega cm, respectively. (C) 2021 Elsevier B.V. All rights reserved.
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页数:9
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