Microstructure of nanocrystalline titanium dioxide thin films deposited on silicon

被引：0
|
作者：
Domaradzki, J [1 ]
Prociow, EL [1 ]
Kaczmarek, D [1 ]
Mielcarek, W [1 ]
机构：
[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50372 Wroclaw, Poland
来源：
ASDAM 2004: THE FIFTH INTERNATIONAL CONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES AND MICROSYSTEMS | 2004年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In present paper results of structural investigations of thin films of titanium dioxide (TiO2) manufactured by modified magnetron sputtering process have been outlined. XRD studies have shown that application of monocrystalline silicon wafers ensured fabrication of thin films with a high quality nanocrystalline structure with average size of grains in the range of (20 divided by 50) nm. It was stated that thin films fabricated by the modified method of magnetron sputtering were contracted at some preferred directions.
引用
收藏
页码：119 / 122
页数：4
相关论文
共 50 条
  • [31] Nanocrystalline silicon thin films deposited by high-frequency sputtering at low temperature
    Zhao, ZX
    Cui, RQ
    Meng, FY
    Zhou, ZB
    Yu, HC
    Sun, TT
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2005, 86 (01) : 135 - 144
  • [32] Optoelectronic and Structural Properties of Plasma Deposited Nanocrystalline Hydrogenated Silicon Oxide Thin Films
    Jana, Tapati
    Goswami, Romyani
    NANO, 2021, 16 (10)
  • [33] Conductivity of thin nanocrystalline silicon films
    Golubev, VG
    Morozova, LE
    Pevtsov, AB
    Feoktistov, NA
    SEMICONDUCTORS, 1999, 33 (01) : 66 - 68
  • [34] Conductivity of thin nanocrystalline silicon films
    V. G. Golubev
    L. E. Morozova
    A. B. Pevtsov
    N. A. Feoktistov
    Semiconductors, 1999, 33 : 66 - 68
  • [35] A study of photocatalysis activity and microstructure of titanium dioxide thin films precoated with CuO
    Ren Chengjun
    Zhong Benghe
    Chen Guoqiang
    RARE METAL MATERIALS AND ENGINEERING, 2006, 35 (05) : 828 - 831
  • [36] Microstructure and magnetism in FeTaN films deposited in the nanocrystalline state
    Viala, B
    Minor, MK
    Barnard, JA
    JOURNAL OF APPLIED PHYSICS, 1996, 80 (07) : 3941 - 3956
  • [37] Surface morphology and structure study of titanium dioxide thin films deposited on PET substrates
    Zhang, Yuhui
    Ji, Quan
    Pei, Xihua
    MULTI-FUNCTIONAL MATERIALS AND STRUCTURES II, PTS 1 AND 2, 2009, 79-82 : 883 - +
  • [38] The influence of surface topography on the photocatalytic activity of electrophoretically deposited titanium dioxide thin films
    Toh, Alicia Guek Geok
    Cai, Ruxiong
    Butler, David Lee
    WEAR, 2009, 266 (5-6) : 585 - 588
  • [39] Interaction of Al2O3 thin films deposited on nanocrystalline titanium with hydrogen
    Nikitenkov, N. N.
    Vilkhivskaya, O. V.
    Nikitenkov, A. N.
    Tyurin, Yu. I.
    Sypchenko, V. S.
    Shulepov, I. A.
    THIN SOLID FILMS, 2015, 591 : 169 - 173
  • [40] Photocatalytic Properties of Cadmium Sulfide Nanoparticles Deposited in Mesoporous Titanium Dioxide Thin Films
    Yarovyi, V.
    Rathousky, J.
    Stroyuk, A. L.
    Wark, M.
    PROCEEDINGS OF THE 6TH EUROPEAN MEETING ON SOLAR CHEMISTRY & PHOTOCATALYSIS: ENVIRONMENTAL APPLICATIONS, 2010, : 178 - 179
12345