MEMS multi-vibrating ring gyroscope for space applications

被引：14
|
作者：
Gill, Waqas Amin [1 ]
Ali, Dima [1 ]
An, Boo Hyun [1 ]
Syed, Wajih U. [2 ]
Saeed, Numan [1 ]
Al-shaibah, Muneera [1 ]
Elfadel, Ibrahim M. [2 ]
Al Dahmani, Sultan [3 ]
Choi, Daniel S. [1 ]
机构：
[1] Khalifa Univ Sci & Technol, Dept Mech Engn, POB 127788, Abu Dhabi, U Arab Emirates
[2] Khalifa Univ Sci & Technol, Dept Elect Engn & Comp Sci, POB 127788, Abu Dhabi, U Arab Emirates
[3] United Arab Emirates Space Agcy, Space Missions Sci & Technol Directorate, POB 7133, Abu Dhabi, U Arab Emirates
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2020年 / 26卷 / 08期
关键词：
D O I：
10.1007/s00542-020-04793-x
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the design of a novel multi-ring vibratory gyroscope. The design incorporates two sets of rings, inner and outer, separated by a set of perforated inertial masses and connected to the outermost anchors by the means of springs. The structure's performance is enhanced by utilizing springs with bends that play a significant role in reducing the device's sensitivity to external shocks. The amalgamation of multiple rings with the C-shaped springs provides higher sensitivity with high shock resistance that makes this multi-vibrating ring gyroscope an ideal inertial sensor for space applications. Such a structure yields in-plane flexural modes that are utilized to sense rotation along the axis normal to the structure's plane.
引用
收藏
页码：2527 / 2533
页数：7
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