MEMS multi-vibrating ring gyroscope for space applications

被引：14

作者：

Gill, Waqas Amin ^{[1
]}

Ali, Dima ^{[1
]}

An, Boo Hyun ^{[1
]}

Syed, Wajih U. ^{[2
]}

Saeed, Numan ^{[1
]}

Al-shaibah, Muneera ^{[1
]}

Elfadel, Ibrahim M. ^{[2
]}

Al Dahmani, Sultan ^{[3
]}

Choi, Daniel S. ^{[1
]}

机构：

[1] Khalifa Univ Sci & Technol, Dept Mech Engn, POB 127788, Abu Dhabi, U Arab Emirates

[2] Khalifa Univ Sci & Technol, Dept Elect Engn & Comp Sci, POB 127788, Abu Dhabi, U Arab Emirates

[3] United Arab Emirates Space Agcy, Space Missions Sci & Technol Directorate, POB 7133, Abu Dhabi, U Arab Emirates

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2020年 / 26卷 / 08期

关键词：

D O I：

10.1007/s00542-020-04793-x

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design of a novel multi-ring vibratory gyroscope. The design incorporates two sets of rings, inner and outer, separated by a set of perforated inertial masses and connected to the outermost anchors by the means of springs. The structure's performance is enhanced by utilizing springs with bends that play a significant role in reducing the device's sensitivity to external shocks. The amalgamation of multiple rings with the C-shaped springs provides higher sensitivity with high shock resistance that makes this multi-vibrating ring gyroscope an ideal inertial sensor for space applications. Such a structure yields in-plane flexural modes that are utilized to sense rotation along the axis normal to the structure's plane.

引用

页码：2527 / 2533

页数：7

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