Femtosecond laser-induced nanofabrication in the near-field of atomic force microscope tip

被引：0
|
作者：
Kirsanov, A
Kiselev, A
Stepanov, A
Polushkin, N
机构：
[1] Russian Acad Sci, Inst Appl Phys, Nizhnii Novgorod 603950, Russia
[2] Russian Acad Sci, Inst Phys Microstruct, Nizhnii Novgorod 603600, Russia
来源：
PHYSICS OF LOW-DIMENSIONAL STRUCTURES | 2003年 / 3-4卷
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D O I：
暂无
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The formation of nano-craters on the surface of metallic films under the tip of atomic force microscope by femtosecond laser pulses is demonstrated. The influence of laser polarization, pulse, duration and tip-sample distance on threshold fluence for nanoprocessing is investigated. Analysis of experiments shows that heating of the tip by laser radiation and its lengthening is the predominant mechanism for laser induced nanoprocessing.
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页码：289 / 295
页数：7
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