One-minute nano-tomography using hard X-ray full-field transmission microscope

被引:78
|
作者
Ge, Mingyuan [1 ]
Coburn, David Scott [1 ]
Nazaretski, Evgeny [1 ]
Xu, Weihe [1 ]
Gofron, Kazimierz [1 ]
Xu, Huijuan [1 ]
Yin, Zhijian [1 ]
Lee, Wah-Keat [1 ]
机构
[1] Brookhaven Natl Lab, NSLS 2, Upton, NY 11973 USA
关键词
SPATIAL-RESOLUTION; CONTRAST; GROWTH; SSRL;
D O I
10.1063/1.5048378
中图分类号
O59 [应用物理学];
学科分类号
摘要
Full field transmission X-ray microscopy (TXM) is a powerful technique for non-destructive 3D imaging with nanometer-scale spatial resolution. However, to date, the typical acquisition time with the hard X-ray TXM at a synchrotron facility is > 10 min for a 3D nano-tomography dataset with sub-50nm spatial resolution. This is a significant limit on the types of 3D dynamics that can be investigated using this technique. Here, we present a demonstration of one-minute nano-tomography with sub-50nm spatial resolution. This achievement is made possible with an in-house designed and commissioned TXM instrument at the Full-field X-ray Imaging beamline at the National Synchrotron Light Source-II at Brookhaven National Laboratory. This capability represents an order of magnitude decrease in the time required for studying sample dynamics with 10 s of nm spatial resolution. Published by AIP Publishing.
引用
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页数:4
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