Conductive paths through polycrystalline BaTiO3: Scanning probe microscopy study

被引:11
|
作者
Ayvazian, Talin [1 ]
Bersuker, Gennadi [1 ]
Lingley, Zachary R. [1 ]
Brodie, Miles J. [1 ]
Foran, Brendan J. [1 ]
机构
[1] Aerosp Corp, Microelect Technol Dept, El Segundo, CA 90245 USA
关键词
MULTILAYER CERAMIC CAPACITORS; ATOMIC-FORCE MICROSCOPY; INSULATION RESISTANCE; GRAIN-BOUNDARIES; FILMS; DEGRADATION; RESISTIVITY; ELECTRODE; EVOLUTION;
D O I
10.1063/1.4961443
中图分类号
O59 [应用物理学];
学科分类号
摘要
The microstructural features determining the leakage current through polycrystalline BaTiO3 films are investigated using Conductive Atomic Force Microscopy. Grain boundaries are found to be the dominant conductive paths compared to the conduction through the grains. Grain boundary currents are observed to reversibly rise with the increase of the applied DC voltages, indicating that the current is controlled by a field- activated charge transport process. Published by AIP Publishing.
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收藏
页数:4
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