Supersonic induction plasma jet modeling

被引:18
|
作者
Selezneva, SE [1 ]
Boulos, MI [1 ]
机构
[1] Univ Sherbrooke, Plasma Technol Res Ctr, CRTP, Dept Chem Engn, Sherbrooke, PQ J1K 2R1, Canada
关键词
nonequilibrium plasma; supersonic flow; impinging jet; induction torch;
D O I
10.1016/S0168-583X(01)00436-0
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Numerical simulations have been applied to study the argon plasma flow downstream of the induction plasma torch. it is shown that by means of the convergent-divergent nozzle adjustment and chamber pressure reduction, a supersonic plasma jet can be obtained. We investigate the supersonic and a more traditional subsonic plasma jets impinging onto a normal substrate. Comparing to the subsonic jet, the supersonic one is narrower and much faster. Near-substrate velocity and temperature boundary layers are thinner, so the heat flux near the stagnation point is higher in the supersonic jet. The supersonic plasma jet is characterized by the electron overpopulation and the domination of the recombination over the dissociation, resulting into the heating of the electron gas. Because of these processes, the supersonic induction plasma permits to separate spatially different functions (dissociation and ionization, transport and deposition) and to optimize each of them, The considered configuration can be advantageous in some industrial applications, such as plasma-assisted chemical vapor deposition of diamond and polymer-like films and in plasma spraying of nanoscaled powders. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:306 / 311
页数:6
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