Design of a bulk-micromachined piezoelectric accelerometer

被引：3
|
作者：
Yang, Hui [1 ]
Guo, Hang [1 ]
机构：
[1] Xiamen Univ, Pen Tung Sah MEMS Res Ctr, Xiamen, Peoples R China
来源：
2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6 | 2007年
关键词：
MEMS; bulk-micromachining; piezoelectric inicroaccelerometer; zinc oxide;
D O I：
10.1109/ULTSYM.2007.654
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A bulk-micromachined piezoelectric accelerometer is proposed and designed, in which the bulk-micromachined silicon seismic mass is suspended by the cantilevers and part of cantilever is covered with ZnO piezoelectric thin film. In this paper, we first derive the one-dimensional analytical model of the piezoelectric cantilever to study the factors affecting the sensitivity of the accelerometer, and then design the piezoelectric accelerometers with straight and folded cantilever structures. Totally, 12 different structures of the microaccelemeter are investigated. The results show that this type of bulk-micromachined piezoelectric accelerometer can own high sensitivity and wide working range to meet requirement of some applications in aerospace and mechanical shock inspection for vehicles.
引用
收藏
页码：2598 / 2601
页数：4
相关论文
共 50 条
  • [21] Sound visualization on bulk-micromachined optical acoustic transducer
    Suzuki, K
    Funaki, H
    Naruse, Y
    2005 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, 2005, : 757 - 758
  • [22] Characterization of a Bulk-Micromachined Membraneless In-Plane Thermopile
    Wang, Ziyang
    van Andel, Yvonne
    Jambunathan, Madhusudhanan
    Leonov, Vladimir
    Elfrink, Rene
    Vullers, Ruud J. M.
    JOURNAL OF ELECTRONIC MATERIALS, 2011, 40 (05) : 499 - 503
  • [23] Ultrasonic transmission and reception from bulk-micromachined transducers
    Harris, PD
    Andrews, MK
    Turner, GC
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2001, 48 (01) : 224 - 231
  • [24] Modeling the mechanical behavior of bulk-micromachined silicon accelerometers
    EXAR Corp, Fremont, United States
    Sens Actuators A Phys, 2 (137-150):
  • [25] Characterization of a Bulk-Micromachined Membraneless In-Plane Thermopile
    Ziyang Wang
    Yvonne van Andel
    Madhusudhanan Jambunathan
    Vladimir Leonov
    Rene Elfrink
    Ruud J. M. Vullers
    Journal of Electronic Materials, 2011, 40 : 499 - 503
  • [26] Modeling of thermal actuation in a bulk-micromachined CMOS micromirror
    Liew, LA
    Tuantranont, A
    Bright, VM
    MICROELECTRONICS JOURNAL, 2000, 31 (9-10): : 791 - 801
  • [27] Magnetic induction machines integrated into bulk-micromachined silicon
    Arnold, DP
    Das, S
    Cros, F
    Zana, I
    Allen, MG
    Lang, JH
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (02) : 406 - 414
  • [28] Modeling the mechanical behavior of bulk-micromachined silicon accelerometers
    van Kampen, RP
    Wolffenbuttel, RF
    SENSORS AND ACTUATORS A-PHYSICAL, 1998, 64 (02) : 137 - 150
  • [29] Bulk-micromachined structures inside anisotropically etched cavities
    Pal, P
    Chandra, S
    SMART MATERIALS & STRUCTURES, 2004, 13 (06): : 1424 - 1429
  • [30] Characterization of bulk-micromachined, direct-bonded silicon nanofilters
    Tu, JK
    Huen, T
    Szema, R
    Ferrari, M
    MICRO- AND NANOFABRICATED STRUCTURES AND DEVICES FOR BIOMEDICAL ENVIRONMENTAL APPLICATIONS, 1998, 3258 : 148 - 155
12345