Development of multilayer coatings and spin-off to XRL applications

被引：1

作者：

Bijkerk, F ^{[1
]}

机构：

[1] FOM, Inst Plasma Phys Rijnhuizen, NL-34309 MN Nieuwegein, Netherlands

来源：

JOURNAL DE PHYSIQUE IV | 2001年 / 11卷 / PR2期

关键词：

D O I：

10.1051/jp4:2001298

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The substantially increased effort on multilayer coating technology, as motivated currently by the application of Mo/Si coatings in Extreme UV lithography, is expected to have a beneficial effect on the technology for multilayer optics in the XUV wavelength range in general. Some examples of new usage of multilayer structures in XRL research are given.

引用

页码：509 / 510

页数：2

共 50 条

[21] Spin-off doctors
Hibbert, L
PROFESSIONAL ENGINEERING, 2000, 13 (10) : 30 - 31
[22] FALLOUT AND SPIN-OFF
不详
NATURE, 1972, 239 (5368) : 134 - &
[23] SPIN-OFF PROPAGANDA
不详
SCIENCE JOURNAL, 1969, A 5 (02): : 28 - &
[24] Going for a spin-off
Eisenstein, Paul
PROFESSIONAL ENGINEERING, 2007, 20 (07) : 31 - 31
[25] Innovation, technology transfer and development: the spin-off companies
Valente, Teodoro
TECHNE-JOURNAL OF TECHNOLOGY FOR ARCHITECTURE AND ENVIRONMENT, 2014, 7 : 21 - 26
[26] MILITARY EXPENDITURE, SPIN-OFF AND ECONOMIC-DEVELOPMENT
DEGER, S
SEN, S
JOURNAL OF DEVELOPMENT ECONOMICS, 1983, 13 (1-2) : 67 - 83
[27] SPACE SPIN-OFF ON TAP
PHILIPS, M
ENGINEERING, 1970, 210 (5440): : 136 - &
[28] SPIN-OFF FROM SPACE
WILTSHIRE, DA
SPACEFLIGHT, 1969, 11 (10): : 360 - +
[29] PLAYING THE SPIN-OFF GAME
COOPER, W
INSTITUTIONAL INVESTOR, 1984, 18 (06): : 149 - &
[30] SPIN-OFF FROM SPACE
EDWARDS, DFA
SPACEFLIGHT, 1972, 14 (10): : 365 - &

← 1 2 3 4 5 →