Cylinder stitching interferometry: with and without overlap regions

被引:0
|
作者
Peng, Junzheng [1 ]
Chen, Dingfu [2 ]
Yu, Yingjie [2 ]
机构
[1] Jinan Univ, Dept Optoelect Engn, Guangzhou 510632, Guangdong, Peoples R China
[2] Shanghai Univ, Dept Precis Mech Engn, Shanghai 200072, Peoples R China
基金
中国博士后科学基金; 中国国家自然科学基金;
关键词
FORM DEVIATIONS; SURFACE;
D O I
10.1117/12.2270910
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Since the cylinder surface is closed and periodic in the azimuthal direction, existing stitching methods cannot be used to yield the 360 degrees form map. To address this problem, this paper presents two methods for stitching interferometry of cylinder: one requires overlap regions, and the other does not need the overlap regions. For the former, we use the first order approximation of cylindrical coordinate transformation to build the stitching model. With it, the relative parameters between the adjacent sub-apertures can be calculated by the stitching model. For the latter, a set of orthogonal polynomials, termed Legendre Fourier (LF) polynomials, was developed. With these polynomials, individual sub-aperture data can be expanded as composition of inherent form of partial cylinder surface and additional misalignment parameters. Then the 360 degrees form map can be acquired by simultaneously fitting all sub-aperture data with LF polynomials. Finally the two proposed methods are compared under various conditions. The merits and drawbacks of each stitching method are consequently revealed to provide suggestion in acquisition of 360 degrees form map for a precision cylinder.
引用
收藏
页数:7
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