Plasma Processing of Nanomaterials: Emerging Technologies for Sensing and Energy Applications

被引:29
|
作者
Gasparotto, Alberto [1 ]
Barreca, Davide [1 ,2 ]
Bekermann, Daniela
Devi, Anjana [3 ]
Fischer, Roland A. [3 ]
Maccato, Chiara
Tondello, Eugenio
机构
[1] Univ Padua, Dept Chem, INSTM, I-35131 Padua, Italy
[2] Univ Padua, CNR ISTM, I-35131 Padua, Italy
[3] Ruhr Univ Bochum, Lehrstuhl Anorgan Chem 2, D-44780 Bochum, Germany
关键词
Plasma Processing; PE-CVD; Co3O4; Nanomaterials; Hydrogen Photo-Production; Gas Sensing; CHEMICAL-VAPOR-DEPOSITION; ZNO NANOROD ARRAYS; THIN-FILMS; COBALT; OXIDE; CO3O4; OZONE; CVD; CO; NANOSYSTEMS;
D O I
10.1166/jnn.2011.5023
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Plasma processing represents an attractive and versatile option for the fabrication of low-dimensional nanomaterials, whose chemical and physical properties can be conveniently tailored for the development of advanced technologies. In particular, Plasma Enhanced-Chemical Vapor Deposition (PE-CVD) is an appealing route to multi-functional oxide nanoarchitectures under relatively mild conditions, owing to the unique features and activation mechanisms of non-equilibrium plasmas. In this context, the potential of plasma-assisted fabrication in advanced nanosystem development is discussed. After a brief introduction on the basic categories of plasma approaches, the perspectives of application to CVD processes are commented, reporting on the growth and characterization of Co3O4 nanomaterials as a case study. Besides examining the interrelations between the material properties and the synthesis conditions, special focus is given to their emerging applications as catalysts for photo-assisted hydrogen production and solid state gas sensors.
引用
收藏
页码:8206 / 8213
页数:8
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