Engineering the gain and bandwidth in avalanche photodetectors

被引:5
|
作者
Bartolo-Perez, Cesar [1 ]
Ahamed, Ahasan [1 ]
Mayet, Ahmed S. [1 ]
Rawat, Amita [1 ]
McPhillips, Lisa [1 ]
Ghandiparsi, Soroush [1 ]
Bec, Julien [2 ]
Arino-Estrada, Gerard [2 ]
Cherry, Simon [2 ]
Wang, Shih-Yuan [3 ]
Marcu, Laura [2 ]
Islam, M. Saif [1 ]
机构
[1] Univ Calif Davis, Elect & Comp Engn, Davis, CA 95616 USA
[2] Univ Calif Davis, Dept Biomed Engn, Davis, CA 95616 USA
[3] W&WSens Devices Inc, 4546 El Camino,Suite 215, Los Altos, CA 94022 USA
关键词
IMPACT IONIZATION; LOW-NOISE; PHOTODIODES; EFFICIENCY;
D O I
10.1364/OE.446507
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Avalanche and Single-Photon Avalanche photodetectors (APDs and SPADs) rely on the probability of photogenerated carriers to trigger a multiplication process. Photon penetration depth plays a vital role in this process. In silicon APD5, a significant fraction of the short visible wavelengths is absorbed close to the device surface that is typically highly doped to serve as a contact. Most of the photogenerated carriers in this region can be lost by recombination, get slowly transported by diffusion, or multiplied with high excess noise. On the other hand, the extended penetration depth of near-infrared wavelengths requires thick semiconductors for efficient absorption. This diminishes the speed of the devices due to the long transit time in the thick absorption layer that is required for detecting most of these photons. Here, we demonstrate that it is possible to drive photons to a critical depth in a semiconductor film to maximize their gain-bandwidth performance and increase the absorption efficiency. This approach to engineering the penetration depth for different wavelengths in silicon is enabled by integrating photon-trapping nanoholes on the device surface. The penetration depth of short wavelengths such as 450 nm is increased from 0.25 mu m to more than 0.62 mu m. On the other hand, for a long-wavelength like 850 nm, the penetration depth is reduced from 18.3 mu m to only 2.3 mu m, decreasing the device transit time considerably. Such capabilities allow increasing the gain in APDs by almost 400x at 450 nm and by almost 9x at 850 nm. This engineering of the penetration depth in APDs would enable device designs requiring higher gain-bandwidth in emerging technologies such as Fluorescence Lifetime Microscopy (FLIM), Time-of-Flight Positron Emission Tomography (TOF-PET), quantum communications systems, and 3D imaging systems. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
引用
收藏
页码:16873 / 16882
页数:10
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