A novel sequential engagement electrodes for vertical comb-drive actuator

被引：0
|
作者：
Wu, Mingching [1 ,3 ]
Lin, Hung-Yi [4 ]
Chen, Rongshun [1 ,2 ]
Fang, Weileun [1 ,2 ]
机构：
[1] Tsinghua Univ, Dept Power Mech Engn, Beijing, Peoples R China
[2] Natl Tsing Hua Univ, MEMS Inst, Hsinchu, Taiwan
[3] ChipSense Corp, Hsinchu, Taiwan
[4] Touch Microsyst Technol Inc, Yangmei, Taiwan
来源：
PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2 | 2007年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work demonstrated the concept of using "sequential engagement of comb electrodes" to improve the linearity and maximum deflection of vertical comb-drive actuator (VCA). This concept is achieved by varying the in-plane distribution of comb electrodes. The simulation and experiment results of VCA with four different electrode-distribution designs demonstrated the feasibility of this study. In comparison, a modified (Reverse curve-distribution) VCA was remarkably improved the performance of conventional (Linear-distribution) VCA. Experiments show that the Reverse curve-distribution VCA improves the nonlinearity for 50% and increases the maximum angular motion for 3.5-fold.
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页码：136 / +
页数：2
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