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- [41] Characterisation of mechanical stresses of device isolation structures by Micro-Raman spectroscopy and modelling ANALYTICAL AND DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS, DEVICES, AND PROCESSES, 1999, 99 (16): : 60 - 75
- [45] Dopant mapping and strain analysis in B doped silicon structures using micro-Raman spectroscopy MICROELECTROMECHANICAL STRUCTURES FOR MATERIALS RESEARCH, 1998, 518 : 239 - 244