Finite thickness influence on spherical and conical indentation on viscoelastic thin polymer film

被引:11
|
作者
Gonda, V
den Toonder, J
Beijer, J
Zhang, GQ
Ernst, LJ
机构
[1] Delft Univ Technol, NL-2628 CD Delft, Netherlands
[2] Philips Res Labs, NL-5656 AA Eindhoven, Netherlands
[3] Philips CFT, NL-5600 MD Eindhoven, Netherlands
关键词
D O I
10.1115/1.1846065
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The thermo-mechanical integration of polymer Alms requires a precise knowledge of material properties. Nanoindentation is a widely used testing method for the determination of material properties of thin films such as Young's modulus and the hardness. An important assumption in the analysis of the indentation is that the indented medium is a semi-infinite plane or half space, i.e., it has an "infinite thickness." In nanoindentation the analyzed material is often a thin film that is deposited on a substrate. If the modulus ratio is small, (soft film on hard substrate) and the penetration depth is small too, then the Hertzian assumption does not hold. We investigate this situation with spherical and conical indentation. Measurement results are shown using spherical indentation on a visco-elastic thin polymer film and a full visco-elastic characterization is presented.
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页码:33 / 37
页数:5
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