InAlN/GaN Bragg reflectors grown by plasma-assisted molecular beam epitaxy

被引:20
|
作者
Gacevic, Z. [1 ]
Fernandez-Garrido, S. [1 ]
Hosseini, D. [2 ]
Estrade, S. [2 ,3 ]
Peiro, F. [2 ]
Calleja, E. [1 ]
机构
[1] Univ Politecn Madrid, ISOM, E-28040 Madrid, Spain
[2] Univ Barcelona, Dept Elect, LENS MIND IN2UB, E-08028 Barcelona, Spain
[3] SCT UB, TEM MAT, Barcelona 08028, Spain
关键词
TEMPERATURE; ALINN; GAN;
D O I
10.1063/1.3517138
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on molecular beam epitaxy growth and characterization of ten-period lattice-matched InAlN/GaN distributed Bragg reflectors (DBRs), with peak reflectivity centered around 400 nm. Thanks to the well tuned ternary alloy composition, crack-free surfaces have been obtained, as confirmed by both optical and transmission electron microscopy (TEM). Their good periodicity and well-defined interfaces have been confirmed by both x-ray diffraction and TEM measurements. Peak reflectivity values as high as 60% with stop bands of 30 nm have been demonstrated. Optical measurements revealed that discrepancy between the obtained (60%) and the theoretically expected (similar to 75%) reflectivity is a consequence of significant residual absorption (similar to 35%). TEM measurements revealed the coexistence of zinc-blende and wurtzite phases, as well as planar defects, mainly in GaN. These defects are suggested as the potential source of the undesired absorption and/or scattering effects that lowered the DBRs' peak reflectivity. c 2010 American Institute of Physics. [doi:10.1063/1.3517138]
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页数:7
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