Dependence of lattice distortion of monoclinic phase on film thickness in Pb(Zr0.58Ti0.42)O3 thin films

被引：7
|
作者：
Wang, J. N. [1 ]
Wang, L. D. [1 ]
Li, W. L. [1 ]
Fei, W. D. [1 ]
机构：
[1] Harbin Inst Technol, State Key Lab Welding Prod Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China
来源：
JOURNAL OF ALLOYS AND COMPOUNDS | 2011年 / 509卷 / 07期
关键词：
Pb(Zr1-xTix)O-3 thin films; Lattice distortion; Film thickness; Texture; PEROVSKITE; DEPOSITION; ORIGIN;
D O I：
10.1016/j.jallcom.2010.12.061
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In this paper, the chosen composition of PZT film falls in rhombohedral phase region and the dependence of lattice distortion on film thickness in sol-gel derived Pb(Zr0.58Ti0.42)O-3 thin films was systematically investigated. The results confirm that the Pb(Zr0.58Ti0.42)O-3 films have monoclinic phase even though the composition falls in the rhombohedral phase region. The mixed textures of (1 0 0) and (1 1 1) occur in the PZT films. In the case of mixed textures, a method using psi-scan XRD to characterize the phase type of Pb(Zr0.58Ti0.42)O-3 film is presented. It is found that the phase type of (1 0 0)-oriented grains is M-A phase, and that of (1 1 1)-oriented grains is M-B phase. Moreover, the lattice constants of both M-A and M-B phases are sensitive to the film thickness. The lattice distortion of monoclinic phase becomes smaller as film thickness increases. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码：3347 / 3352
页数：6
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