As chips shrink, cleaning needs grow

被引：0

|

作者：

Mccoy, Michael ^{[1
]}

机构：

[1] C&EN, New York, NY 10004 USA

来源：

CHEMICAL & ENGINEERING NEWS | 2017年 / 95卷 / 40期

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D O I：

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中图分类号：

O6 [化学];

学科分类号：

0703 ;

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页码：32 / 33

页数：2

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