First plasma of the A-PHOENIX electron cyclotron resonance on source

被引:7
|
作者
Thuillier, T. [1 ,2 ]
Lamy, T. [1 ,2 ]
Latrasse, L. [1 ,2 ]
Angot, J. [1 ,2 ]
机构
[1] Univ Grenoble 1, Lab Phys Subatom & Cosmol, CNRS, IN2P3, F-38026 Grenoble, France
[2] Inst Natl Polytech Grenoble, F-38026 Grenoble, France
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2008年 / 79卷 / 02期
关键词
D O I
10.1063/1.2816703
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A-PHOENIX is a new compact hybrid electron cyclotron resonance ion source using a large permanent magnet hexapole (1.92 T at the magnet surface) and high temperature superconducting Solenoids (3 T) to make min-vertical bar B vertical bar structure suitable for 28 GHz cw operation. The final assembly of the source was achieved at the end of June 2007. The first plasma of A-PHOENIX at 18 GHz was done on the 16th of August, 2007. The technological specificities of A-PHOENIX are presented. The large hexapole built is presented and experimental magnetic measurements show that it is nominal with respect to simulation. A fake plasma chamber prototype including thin iron inserts showed that the predicted radial magnetic confinement can be fulfilled up to 2.15 T at the plasma chamber wall. Scheduled planning of experiments until the end of 2008 is presented. (C) 2008 American Institute of Physics.
引用
收藏
页数:3
相关论文
共 50 条
  • [21] Characterization of a permanent magnet electron cyclotron resonance plasma source
    Mantei, T.O.
    Ohale, S.
    Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 1991, 9 (01): : 26 - 28
  • [23] Electron cyclotron resonance plasma source in a flaring magnetic field
    Caron, X.
    Meyer, R.L.
    Meis, C.
    Plasma Sources Science and Technology, 1994, 3 (02)
  • [24] Plasma expansion from a dielectric electron cyclotron resonance source
    Aanesland, A
    Charles, C
    PHYSICA SCRIPTA, 2006, T122 : 19 - 24
  • [25] Characterization of electron cyclotron resonance source plasma for etching and deposition
    Angra, SK
    Kumar, P
    Banerjie, PC
    Bajpai, RP
    THIN SOLID FILMS, 1997, 304 (1-2) : 294 - 298
  • [26] Multicomponent consideration of electron fraction of electron-cyclotron resonance source plasma
    Shirkov, G
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (02): : 850 - 852
  • [27] Electron temperature of a plasma in a calcium plasma source based on an electron cyclotron resonance discharge in vapor
    Gorshunov, N. M.
    Potanin, E. P.
    TECHNICAL PHYSICS, 2015, 60 (02) : 217 - 221
  • [28] Electron temperature of a plasma in a calcium plasma source based on an electron cyclotron resonance discharge in vapor
    N. M. Gorshunov
    E. P. Potanin
    Technical Physics, 2015, 60 : 217 - 221
  • [29] An open-cavity electron cyclotron resonance plasma/ion source
    Ning, FT
    Hu, Y
    Lin, TL
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (12A): : 6902 - 6907
  • [30] ELONGATED MICROWAVE ELECTRON-CYCLOTRON RESONANCE HEATING PLASMA SOURCE
    GEISLER, M
    KIESER, J
    RAUCHLE, E
    WILHELM, R
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (02): : 908 - 915