ANALYZING THICKNESS SHEAR VIBRATION OF ZNO THIN FILM WITH A VISCOELASTIC LAYER

被引：0

作者：

Fu, Xian ^{[1
]}

Du, Jian-ke ^{[1
]}

Lou, Jia ^{[1
]}

Wang, Ji ^{[1
]}

Ma, Ting-feng ^{[1
]}

Huang, Bin ^{[1
]}

Yi, Li-jun ^{[1
]}

机构：

[1] Ningbo Univ, Sch Mech Engn & Mech, Ningbo 315211, Zhejiang, Peoples R China

来源：

PROCEEDINGS OF THE 2015 SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS | 2015年

关键词：

Film Bulk Acoustic Wave Resonators; Viscoelasticity; Thickness shear vibration; Resonant frequency;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

According to the linear piezoelectric theory, the frequency equation of thickness shear vibration is obtained for investigating the ZnO thin film with a layer of viscoelastic media. Fortunately, some useful results are harvested. From these results, we find that the relative resonant frequency significantly increases when the viscous coefficient is in the range of 0-2Ns/m(2). The relation between the relative resonant frequency and the density and thickness of the viscoelastic media also has been discussed. These need to be considered in the design of resonators.

引用

页码：442 / 445

页数：4

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