Chromatic confocal displacement sensing at oblique incidence angles

被引：9
|
作者：
Berkovic, G. [1 ]
Zilberman, S. [1 ]
Shafir, E. [1 ]
Rubin, D. [1 ]
机构：
[1] Soreq NRC, IL-81800 Yavne, Israel
来源：
APPLIED OPTICS | 2020年 / 59卷 / 10期
关键词：
MICROSCOPY; THICKNESS;
D O I：
10.1364/AO.388123
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A commercial chromatic confocal displacement sensor, designed for probing a target at normal incidence, is adapted to probe reflective targets at an oblique incidence angle. The sensor is modified by positioning two low-cost optical elements-a collimating lens and a retro-reflector-in the reflection plane. (C) 2020 Optical Society of America
引用
收藏
页码：3183 / 3186
页数：4
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