Quantitative zone-axis convergent beam electron diffraction: Current status and future prospects

Quantitative zone-axis convergent beam electron diffraction (CBED) is now an established technique. Over the past decade it has been developed into a tested method for the accurate refinement of structure factors, allowing the details of the charge density and bonding effects to be studied in crystalline materials. Strategies for obtaining the most accurate results have evolved, and the most important influences on the accuracy have been determined. Initial applications of the technique to bond charge density determination have led to the extension of the method to the refinement of other important parameters influencing the experimental data, such as Debye-Waller factors and the absorption potential. The development and current status of quantitative zone-axis CBED are discussed. Prospects for the future development and application of the technique are also considered.