Mutual passivation in dilute GaNxAs1-x alloys

被引:0
|
作者
Yu, KM [1 ]
Walukiewicz, W [1 ]
Wu, J [1 ]
Mars, DE [1 ]
Scarpulla, MA [1 ]
Dubon, OD [1 ]
Ridgway, MC [1 ]
Geisz, JF [1 ]
机构
[1] Lawrence Berkeley Lab, Div Sci Mat, Berkeley, CA 94720 USA
来源
SEMICONDUCTOR DEFECT ENGINEERING-MATERIALS, SYNTHETIC STRUCTURES AND DEVICES | 2005年 / 864卷
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The dilute GaNxAs1-x alloys (with x up to 0.05) have exhibited many unusual properties as compared to the conventional binary and ternary semiconductor alloys. We report on a new effect in the GaNxAs1-x alloy system in which electrically active substitutional group IV donors and isoelectronic N atoms passivate each other's activity. This mutual passivation occurs in dilute GaNxAs1-x doped with group TV donors through the formation of nearest neighbor IVGa-N-As pairs when the samples are annealed under conditions such that the diffusion length of the donors is greater than or equal to the average distance between donor and N atoms. The passivation of the shallow donors and the N-As atoms is manifested in a drastic reduction in the free electron concentration and, simultaneously, an increase in the fundamental bandgap. This mutual passivation effect is demonstrated in both Si and Ge doped GaNxAs1-x alloys. Analytical calculations of the passivation process based on Ga vacancy mediated diffusion show good agreement with the experimental results.
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页码:413 / 424
页数:12
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