Study of heat transfer in microscale systems

被引：0

作者：

Pryputniewicz, Ryszard J. ^{[1
]}

Pryputniewicz, Dariusz R. ^{[1
]}

机构：

[1] Worcester Polytech Inst, Dept Mech Engn, CHSLT, NEST NanoEngn Sci & Technol, Worcester, MA 01609 USA

来源：

IPACK 2007: PROCEEDINGS OF THE ASME INTERPACK CONFERENCE 2007, VOL 1 | 2007年

关键词：

MEMS; microscale systems; mu ChemLab; GaAsFET amplifier; thermal analysis; package level model; chip level model; measurements;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Progress in micromachining technology enabled fabrication of micron-sized mechanical devices, which have had a major impact on many disciplines. These devices have not only led to development of miniature transducers for sensing and actuation, but also a chip-based chemical laboratory (mu ChemLab) and other microelectromechanical systems (MEMS). Applications of these microscale systems frequently demand heat removal and temperature control. This paper presents preliminary results of a study of heat transfer in microscale systems. Computational modeling is based on Thermal Analysis System (TAS), which facilitates multiscale modeling/simulation, and measurements are made using infrared (IR) microscopy. Representative applications describe multiscale modeling and measurement results obtained for a microhotplate of a mu ChemLab and a highpower GaAs FET amplifier. Comparison of the preliminary experimental/measurement and computational/modeling results shows good correlation.

引用

页码：155 / 162

页数：8

共 50 条

[1] Microscale heat transfer in biological systems at low temperatures
Rubinsky, B
EXPERIMENTAL HEAT TRANSFER, 1997, 10 (01) : 1 - 29
[2] On Simulation of Heat Transfer at Microscale: A Case Study
Tibeica, C.
Voicu, R.
2017 INTERNATIONAL SEMICONDUCTOR CONFERENCE (CAS), 40TH EDITION, 2017, : 217 - 220
[3] Experimental study on flow and heat transfer characteristics in a microscale heat exchanger
Tao, Wang
Hu, Xuegong
Tang, Dawei
ICNMM2007: PROCEEDINGS OF THE 5TH INTERNATIONAL CONFERENCE ON NANOCHANNELS, MICROCHANNELS, AND MINICHANNELS, 2007, : 639 - 644
[4] Microscale heat transfer 2
Trannoy, N
SUPERLATTICES AND MICROSTRUCTURES, 2004, 35 (3-6) : 159 - 160
[5] Microscale evaporation heat transfer
Kuznetsov, VV
Safonov, SA
MICROSCALE HEAT TRANSFER: FUNDAMENTALS AND APPLICATIONS, 2005, 193 : 303 - 320
[6] Microscale heat transfer utilizing microscale and nanoscale phenomena
Yabe, A
Microscale Heat Transfer: Fundamentals and Applications, 2005, 193 : 149 - 156
[7] Advancement in Numerical Study of Gas Flow and Heat Transfer in Microscale
Vakilipour, Shidvash
Darbandi, Masoud
JOURNAL OF THERMOPHYSICS AND HEAT TRANSFER, 2009, 23 (01) : 205 - 208
[8] Study on radial heat transfer coefficient of heat pipes considering microscale heat transfer in evaporating meniscus region
Ding S.
Ma S.
Gong S.
Huagong Xuebao/CIESC Journal, 2023, 74 (11): : 4527 - 4534
[9] Microscale heat transfer at low temperatures
Radebaugh, R
MICROSCALE HEAT TRANSFER: FUNDAMENTALS AND APPLICATIONS, 2005, 193 : 93 - 124
[10] Recent developments in microscale heat transfer
Tien, CL
HEAT TRANSFER SCIENCE AND TECHNOLOGY 1996, 1996, : 1 - 1

← 1 2 3 4 5 →