Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm

被引：18

作者：

Kimura, Takashi ^{[1
]}

Mimura, Hidekazu ^{[1
]}

Handa, Soichiro ^{[1
]}

Yumoto, Hirokatsu ^{[2
]}

Yokoyama, Hikaru ^{[1
]}

Imai, Shota ^{[1
]}

Matsuyama, Satoshi ^{[1
]}

Sano, Yasuhisa ^{[1
]}

Tamasaku, Kenji ^{[3
]}

Komura, Yoshiki ^{[3
]}

Nishino, Yoshinori ^{[4
]}

Yabashi, Makina ^{[2
]}

Ishikawa, Tetsuya ^{[2
,3
]}

Yamauchi, Kazuto ^{[1
,5
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Precis Sci & Technol, Suita, Osaka 5650871, Japan

[2] JASRI, SPring 8, Sayo, Hyogo 6795198, Japan

[3] RIKEN, SPring 8, Sayo, Hyogo 6795198, Japan

[4] Hokkaido Univ, Res Inst Elect Sci, Kita Ku, Sapporo, Hokkaido 0010021, Japan

[5] Osaka Univ, Grad Sch Engn, Ctr Ultraprecis Sci & Technol, Suita, Osaka 5650871, Japan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2010年 / 81卷 / 12期

关键词：

PHASE RETRIEVAL; ADAPTIVE OPTICS; OPTIMIZATION;

D O I：

10.1063/1.3509384

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In situ wavefront compensation is a promising method to realize a focus size of only a few nanometers for x-ray beams. However, precise compensation requires evaluation of the wavefront with an accuracy much shorter than the wavelength. Here, we characterized a one-dimensionally focused beam with a width of 7 nm at 20 keV using a multilayer mirror. We demonstrate that the wavefront can be determined precisely from multiple intensity profiles measured around the beamwaist. We compare the phase profiles recovered from intensity profiles measured under the same mirror condition but with three different aperture sizes and find that the accuracy of phase retrieval is as small as lambda/12. (C) 2010 American Institute of Physics. [doi:10.1063/1.3509384]

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页数：5

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