Thermal stability improvement of Ni germanide utilizing Ni-Pd alloy for nano-scale Ge MOSFETs

被引:0
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作者
Zhang, Ying-Ying [1 ]
Zhong, Zhun [1 ]
Li, Shi-Guang [1 ]
Jung, Soon-Yen [1 ]
Park, Kee-Young [1 ]
Lee, Ga-Won [1 ]
Wang, Jin-Suk [1 ]
Oh, Jung-Woo
Majhi, Prashant
Tseng, Hsing-Huang
Lee, Hi-Deok [1 ]
机构
[1] Chungnam Natl Univ, Dept Elect Engn, Taejon 305764, South Korea
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EXTENDED ABSTRACTS 2008 INTERNATIONAL WORKSHOP ON JUNCTION TECHNOLOGY | 2008年
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T [工业技术];
学科分类号
08 ;
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页码:158 / 161
页数:4
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